Carbozen-H SERIES, Hybrid CVD Coating Machine

See Larger Picture : Carbozen-H SERIES, Hybrid CVD Coating Machine

Company Name:J&L Tech Co., Ltd.
Membership:Free Member
Member Since:2010. 08.05
Country/Region:Korea
City:Gyeonggi-do
Contact:Ulrim Yang
Related Keywords:Advanced hybrid coating system, coating equipment, surface treatment

Share to :

Contact Now* Send an Inquiry to this supplier.

Start Order * Name your price

Browse by Category

You may also be intersted in: hollow cathode dischargeion platingpecvdnitriding systemmetal cathodic arccoating equipmentplasma enhanced cvd systemfiltered cathodic

J&L Tech Co., Ltd.
[Korea]

Address: 152, Byulmang-ro Danwon-gu, Ansan-city Gyeonggi-do

Phone: 82-41-4991005

Contact name: Ulrim Yang

Report Item

Product Details

Quick Information

Brand Name: J&L Tech Co., Ltd
Place of Origin: Korea

Description

CARBOZEN^TM-H (Hybrid PVD) is a coating equipment which satisfies the customer's variety needs through a combination of Linear Ion Source and UBM sputter.

◆ System Specification

Chamber Size	ø600 x H600, ø700 x H900, ø800 x H1000, ø1000 x H1000, ø1000 x H1200, Custom-made
Jig System	Revolution and rotation type with 2 or 3 folds
Working Gas	Mass flow control system Ar, N2, O2, C2H2, CH4, C6H6, etc
Plasma Source	Linear Ion Source, UBM Sputter
The Initial Vacuum Degree	~ 10-6 Torr
Bias Power	Pulsed DC
Heater	Max 250˚C (Optional 450˚C)
Device Operation	Automatic / Semi-automatic

◆ Advantages of Linear Ion Source

•Provides stable ion energy during deposition
•Excellent coating layer forming even though large-area deposition
•Low maintenance costs
•Cleaning using Ar, O2, N2 gas

Ion Plating Rate	300 nm/min
Residual Stress	~ 2.0 GPa
Hardness	~ 28 GPa
Friction Coefficient	~ 0.1

	LIS350	LIS650	LIS800	LIS1000	LIS1200
Size (mm)	W102 x H380	W102 x H680	W102 x H840	W102 x H1044	W102 x H1244
Type of Magnet	Permanent magnet
Effective Area of Coating	340 mm	656 mm	790 mm	990 mm	1190 mm
Coating Uniformity	± 3%
Discharge Voltage	500 ~ 3000 V
Operative Pressure	0.7 ~ 3 mTorr
Type of Gas	Ar, N2, O2, C2H2, CH4, etc

◆ Advantages of UBM Sputter
•Able to deposit or alloys, compounds and insulating layers
•Possible to numerous reactive sputtering
•Uniformity of the deposition layer
•Possible to use on large target
•No macro-particles that cause matters to arc deposition
•Possible to use in low temperatures
•Easy to color coat on a thin film of oxide and metal nitride

	UBM350	UBM650	UBM850	UBM1050	UBM1200
Size (mm)	W100 x H350	W100 x H680	W120 x H850	W120 x H1050	W120 x H1200
Type of Magnet	Permanent magnet
Coating Uniformity	± 3%
Operative Pressure	‹ 30 mTorr

Product Image

Buyer	Transaction Information	Feed Back
No Data.

Other products from this supplier

Related products from premium suppliers on EC21

Ti Coating Machine

Send an Inquiry to this supplier

Send an Inquiry to this supplier
* From
To	Ulrim Yang J&L Tech Co., Ltd.
* Buying Product	- Please enter your specific buying item. e.g. 42 inch LCD TV, leather executive chair Category : Metal Coating Machinery
* Message	Use English only Max. 2000 characters. (Min. 20) Send
EC21.com does not guarantee the validity of product information or the credentials of sellers.