Carbozen-FA SERIES, Vacuum Arc Coating Machine

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Company Name:J&L Tech Co., Ltd.
Membership:Free Member
Member Since:2010. 08.05
Country/Region:Korea
City:Gyeonggi-do
Contact:Ulrim Yang
Related Keywords:Filtered cathodic, vacuum arc system, coating equipment, surface treatment

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J&L Tech Co., Ltd.
[Korea]

Address: 152, Byulmang-ro Danwon-gu, Ansan-city Gyeonggi-do

Phone: 82-41-4991005

Contact name: Ulrim Yang

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Product Details

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Brand Name: J&L Tech Co., Ltd
Place of Origin: Korea

Description

The CARBOZEN^TM-FA( Filtered Cathodic Vacuum Arc) SERIES is an equipment for coating which utilizes an arc discharge, ion plating the Metallic targets of negative electrodes and coats the surface of the product. The biggest problem in the arc ion plating is a droplet (macro-particle) of µm size. This droplet reduces the properties of the thin film, in particular, surface roughness. CARBOZEN-FA of J&L TECH is a device for smoothing by attaching a magnetic filter to remove droplets.

◆ System Specification

Chamber Size	ø600 x H600, Custom-made
Jig System	Rvolution and rotation with 2 or 3 fold
Working Gas	Mass flow control system Ar
Plasma Source	FCVA Source
The Initial Vacuum Degree	~ 10-6 Torr
Bias Power	Pulsed DC
Heater	Max 250˚C
Device Operation	Automatic / Semi-automatic

◆ Advantages of FCVA Source
•Droplet elimination and ultra-smooth surface through dual-bent duct filtering
•Large area coating through Beam-rastering
•Innovative electrode design for stable plasma beam
•High adhesion for the substrate
•High reproducibility and ease of maintenance

◆Characteristics of ta-C layer by Double Bent FCVA

Single bent		Double bent
Deposition Rate	30 nm/min	5 nm/min
Surface Roughness (Ra)	‹ 1.0 nm	‹ 0.5 nm
Hardness	~ 80 GPa	~ 80 GPa
Friction Coefficient	‹0.15	‹0.15

◆ Specification of FCVA Source

		Single Bent Double Bent
Cathode	Material of the Target	Graphite
	Size	ø75 x 25(L) mm
Duct	Size	I.D.ø144mm, O.D.ø165.2mm
	Angle	45°
	Filtration Method	Single	Double
	Magnet	Source magnet (SM), Bending magnet (BM), Output magnet(OM), Raster magnet(RM)	Source magnet (SM), Bending magnet (BM), Emission magnet(EM), Output magnet (OM), Raster magnet(RM)

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