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Carbozen-C SERIES, Plasma Enhanced CVD Coating Machine

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J&L Tech Co., Ltd.
[Korea]

Address
152, Byulmang-ro Danwon-gu, Ansan-city Gyeonggi-do
Phone
82-41-4991005
Contact name
Ulrim Yang

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Product Details

Quick Information

  • Brand Name: J&L Tech Co., Ltd
  • Place of Origin: Korea

Description

CARBOZENTM-C (PECVD: Plasma Enhanced CVD) SERIES is in the CVD method which uses plasma and it demands decompose ion gas, utilizing a generated glow discharge.


◆ System Specification 
Chamber Size Custom-made
Working Gas Mass flow control system Ar, O2, C2H2, CH4, C6H6, etc
The Initial Vacuum Degree  ~ 10-6 Torr
Bias Power 13.56 MHz (RF)
Device Operation Automatic / Semi-automatic
Cooling System Water cooled
 
◆DLC Characteristics deposited by CARBOZENTM  -C
Ion Plating  Rate Max. 70 nm/min (depending on the process parameters)
Residual Stress ~ 2.0 GPa
Hardness ~ 18 GPa
Friction coefficient ~ 0.1
Surface roughness ‹ 0.1 nm

◆ Applications
       Plane-DLC
          •Light guide plates, CD molds, and Coin Heads for specular display components
       Inner DLC
          •Compressor parts for refrigerators and chemical plant pipes


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